Research Catalog

Title

Process, equipment, and materials control in integrated circuit manufacturing II : 16-17 October 1996, Austin, Texas / Armando Iturralde, Te-Hua Lin, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International [and others].

Publication

Bellingham, Wash. : Society of Photo-optical Instrumentation Engineers, ©1996.

Items in the Library & Off-site

Details

Additional Authors

• Iturralde, Armando.
• Lin, Te-Hua.
• Society of Photo-Optical Instrumentation Engineers.
• Semiconductor Equipment and Materials International.

Description

vii, 258 pages : illustrations; 28 cm.

Series Statement

SPIE proceedings series ; v. 2876

Uniform Title

Proceedings of SPIE--the International Society for Optical Engineering ; v. 2876.

Alternative Title

Control in integrated circuit manufacturing II

Subject

• Integrated circuits > Design and construction > Congresses
• Semiconductors > Design and construction > Congresses
• Plasma etching > Congresses
• Metallizing > Congresses
• Dielectric films > Congresses
• Dielectric films
• Integrated circuits > Design and construction
• Metallizing
• Plasma etching
• Semiconductors > Design and construction

Genre/Form

Conference papers and proceedings.

Bibliography (note)

• Includes bibliographical references and index.

Contents

Plenary paper: Productivity improvement through industrial engineering in the semiconductor industry / D. Meyersdorf -- Advanced process controls in integrated circuit manufacturing -- Advanced equipment controls in integrated circuit manufacturing -- Advanced materials controls in integrated circuit manufacturing -- Poster session.

ISBN

• 0819422746
• 9780819422743

LCCN

96069471

OCLC

• ocm35664549
• 35664549
• SCSB-2094390

Owning Institutions

Princeton University Library