Research Catalog

Processing of semiconductors

Title
Processing of semiconductors / volume editor, Kenneth A. Jackson.
Publication
Weinheim ; New York : VCH, c1996.

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Details

Additional Authors
Jackson, Kenneth A.
Description
689 p. : ill.; 25 cm.
Series Statement
Materials science and technology ; v. 16
Uniform Title
Materials science and technology (Weinheim, Germany) ; v. 16.
Subject
  • Semiconductors
  • semiconductor
  • Semiconductors
Bibliography (note)
  • Includes bibliographical references and index.
ISBN
  • 3527268138
  • 9783527268139
  • 1560811900
  • 9781560811909
OCLC
  • on1340683480
  • 1340683480
  • SCSB-9171506
Owning Institutions
Princeton University Library