Research Catalog

Optical microlithography X : 12-14 March, 1997, Santa Clara, California

Title
Optical microlithography X : 12-14 March, 1997, Santa Clara, California / Gene E. Fuller, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations SEMI--Semiconductor Equipment and Materials International, SEMATECH.
Publication
Bellingham, Wash. : SPIE, c1997.

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Details

Additional Authors
  • Fuller, Gene E.
  • Society of Photo-Optical Instrumentation Engineers.
  • Semiconductor Equipment and Materials International.
  • SEMATECH (Organization)
Description
xi, 982 p. : ill.; 28 cm.
Series Statement
SPIE proceedings series ; v. 3051
Uniform Title
Proceedings of SPIE--the International Society for Optical Engineering ; v. 3051.
Subject
  • Microlithography > Congresses
  • Integrated circuits > Very large scale integration > Congresses
Bibliography (note)
  • Includes bibliographical references and index.
ISBN
081942465X
OCLC
  • ocm37380356
  • SCSB-2125398
Owning Institutions
Princeton University Library