Research Catalog
Advances in resist technology and processing XIV : 10-12 March, 1997, Santa Clara, California
- Title
- Advances in resist technology and processing XIV : 10-12 March, 1997, Santa Clara, California / Régine G. Tarascon-Auriol, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SEMATECH.
- Publication
- Bellingham, Wash. : Society of Photo-optical Instrumentation Engineers, ©1997.
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Status | Format | Access | Call Number | Item Location |
---|---|---|---|---|
Book/Text | Use in library | TA1505 .P762 vol.3049 | Off-site |
Details
- Additional Authors
- Description
- xv, 1028 pages : illustrations; 28 cm.
- Series Statement
- SPIE proceedings series, 0277-786X ; v. 3049
- Uniform Title
- Proceedings of SPIE--the International Society for Optical Engineering ; v. 3049.
- Alternative Title
- Resist technology and processing XIV
- Subject
- Genre/Form
- Conference papers and proceedings.
- Note
- "Papers presented at the 14th conference on Advances in Resist Technology and Processing, held ... as part of the 1997 SPIE Symposium on Microlithography"--Page xv.
- Bibliography (note)
- Includes bibliographical references and index.
- Contents
- Plenary session -- Mechanistic and materials aspects of 193-nm resists -- Lithographic materials for 193-nm lithography -- Characterization methods for chemically amplified resists -- Modeling aspects of chemically amplified resists -- Materials aspects of chemically ampilified resists -- Process development of chemically amplified resists -- Mechanistic aspects of novolac/DNQ resists -- Processes using antireflective layers/top-surface imaging -- Poster session: Chemically amplified systems -- Poster session: Dissolusion inhibition systems -- Poster session: Electron-beam/x-ray resists applications -- Poster session: New materials and characterization methods -- Poster session: Process development.
- ISBN
- 0819424633
- 9780819424631
- OCLC
- ocm37380395
- 37380395
- SCSB-2125400
- Owning Institutions
- Princeton University Library