Research Catalog
Introduction to microlithography : theory, materials, and processing
- Title
- Introduction to microlithography : theory, materials, and processing / Larry F. Thompson, editor, C. Grant Willson, editor, Murrae J.S. Bowden, editor ; based on a workshop sponsored by the ACS Division of Organic Coatings and Plastics Chemistry at the 185th Meeting of the American Chemical Society, Seattle, Washington, March 20-25, 1983.
- Publication
- Washington, D.C. : The Society, 1983.
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Status | Format | Access | Call Number | Item Location |
---|---|---|---|---|
Book/Text | Use in library | TR940 .I57 1983 | Off-site |
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Details
- Additional Authors
- Description
- ix, 363 p. : ill.; 24 cm.
- Series Statement
- ACS symposium series, 0097-6156 ; 219
- Subject
- Bibliography (note)
- Includes bibliographies and index.
- Contents
- An introduction to lithography / L.F. Thompson -- The lithographic process--the physics / L.F. Thompson and M.J. Bowden -- Organic resist materials--theory and chemistry / C. Grant Willson -- Resist processing / L.F. Thompson and M.J. Bowden -- Plasma etching / J.A. Mucha and D.W. Hess -- Multi-layer resist systems / B.J. Lin.
- ISBN
- 0841207755
- LCCN
- 83005968
- OCLC
- ocm09371344
- SCSB-9147964
- Owning Institutions
- Princeton University Library