Research Catalog

Introduction to microlithography : theory, materials, and processing

Title
Introduction to microlithography : theory, materials, and processing / Larry F. Thompson, editor, C. Grant Willson, editor, Murrae J.S. Bowden, editor ; based on a workshop sponsored by the ACS Division of Organic Coatings and Plastics Chemistry at the 185th Meeting of the American Chemical Society, Seattle, Washington, March 20-25, 1983.
Publication
Washington, D.C. : The Society, 1983.

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Book/TextUse in library TR940 .I57 1983Off-site

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Additional Authors
  • Thompson, L. F., 1944-
  • Willson, C. G. (C. Grant), 1939-
  • Bowden, M. J., 1943-
  • American Chemical Society. Division of Organic Coatings and Plastics Chemistry.
  • American Chemical Society. Meeting (185th : 1983 : Seattle, Wash.)
Description
ix, 363 p. : ill.; 24 cm.
Series Statement
ACS symposium series, 0097-6156 ; 219
Subject
  • Photolithography > Congresses
  • Photoresists > Congresses
Bibliography (note)
  • Includes bibliographies and index.
Contents
An introduction to lithography / L.F. Thompson -- The lithographic process--the physics / L.F. Thompson and M.J. Bowden -- Organic resist materials--theory and chemistry / C. Grant Willson -- Resist processing / L.F. Thompson and M.J. Bowden -- Plasma etching / J.A. Mucha and D.W. Hess -- Multi-layer resist systems / B.J. Lin.
ISBN
0841207755
LCCN
83005968
OCLC
  • ocm09371344
  • SCSB-9147964
Owning Institutions
Princeton University Library