Research Catalog

X-ray lithography and applications of soft x-rays to technology : October 19-20, 1983, Upton, New York

Title
X-ray lithography and applications of soft x-rays to technology : October 19-20, 1983, Upton, New York / Alan D. Wilson, chairman/editor ; cosponsors, National Synchrotron Light Source/Brookhaven National Laboratory, SPIE--The International Society for Optical Engineering.
Publication
Bellingham, Wash. : SPIE--The International Society for Optical Engineering, c1984.

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Additional Authors
  • Wilson, Alan D.
  • National Synchrotron Light Source (Organization : U.S.)
  • Society of Photo-optical Instrumentation Engineers.
Description
vi, 140 p. : ill.; 28 cm.
Series Statement
Proceedings of SPIE--the International Society for Optical Engineering ; v. 448
Subject
  • X-rays > Industrial applications > Congresses
  • Lithography, Electron beam > Congresses
  • Photoresists > Congresses
  • Masks (Electronics) > Congresses
Bibliography (note)
  • Includes bibliographies and index.
ISBN
0892524839
LCCN
83051563
OCLC
  • ocm59693480
  • SCSB-97142
Owning Institutions
Princeton University Library