Research Catalog

Spectroscopic characterization techniques for semiconductor technology : 9-10 November 1983, Cambridge, Massachusetts

Title
Spectroscopic characterization techniques for semiconductor technology : 9-10 November 1983, Cambridge, Massachusetts / Fred H. Pollak, Robert S. Bauer, chairmen/editors.
Publication
Bellingham, Wash., USA : SPIE--International Society for Optical Engineering, ©1984.

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Details

Additional Authors
  • Pollak, Fred H.
  • Bauer, Robert S.
  • Society of Photo-Optical Instrumentation Engineers.
Description
vi, 203 pages : illustrations; 28 cm.
Series Statement
Proceedings of SPIE--the International Society for Optical Engineering ; v. 452
Uniform Title
Proceedings of SPIE--the International Society for Optical Engineering ; v. 452.
Subject
  • Semiconductors > Testing > Congresses
  • Spectrum analysis > Congresses
  • Semiconductors > Testing
  • Spectrum analysis
Genre/Form
Conference papers and proceedings.
Bibliography (note)
  • Includes bibliographical references and index.
ISBN
  • 0892524871
  • 9780892524877
LCCN
83051560
OCLC
  • ocm10837624
  • 10837624
  • SCSB-99581
Owning Institutions
Princeton University Library