Research Catalog

Advances in resist technology : March 12-13, 1984, Santa Clara, California

Title
Advances in resist technology : March 12-13, 1984, Santa Clara, California / C. Grant Willson, chairman/editor.
Publication
Bellingham, Wash. : SPIE--the International Society for Optical Engineering, c1984.

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Details

Additional Authors
  • Willson, C. G. (C. Grant), 1939-
  • Society of Photo-Optical Instrumentation Engineers.
Description
vi, 195 p. : ill.; 28 cm.
Series Statement
Proceedings of SPIE--the International Society for Optical Engineering ; v. 469
Subject
  • Photoresists > Congresses
  • Integrated circuits > Masks > Congresses
  • Lithography, Electron beam > Congresses
Bibliography (note)
  • Includes bibliographical references and index.
ISBN
0892525045
LCCN
84050823
OCLC
  • ocm10994602
  • SCSB-600995
Owning Institutions
Princeton University Library