Research Catalog

Silicides for VLSI applications

Title
Silicides for VLSI applications / S.P. Murarka.
Author
Murarka, S. P.
Publication
New York : Academic Press, 1983.

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TextUse in library TK7871.15.S54 M87 1983Off-site

Details

Description
xi, 200 pages : illustrations; 24 cm
Alternative Title
Silicides for V.L.S.I. applications.
Subject
  • Silicides
  • Electronics > Materials
  • Integrated circuits > Very large scale integration
Note
  • Includes indexes.
Bibliography (note)
  • Bibliography: p. 177-186.
ISBN
  • 0125112203
  • 9780125112208
LCCN
82016414
OCLC
  • ocm08786066
  • 8786066
  • SCSB-9337299
Owning Institutions
Princeton University Library