Research Catalog

Developments in semiconductor microlithography IV : April 23-24, 1979, San Jose, California

Title
Developments in semiconductor microlithography IV : April 23-24, 1979, San Jose, California / Jim Dey, editor ; cooperating organization, Northern California Microphotomask/Masking Working Group.
Publication
Bellingham, Wash. : Society of Photo-optical Instrumentation Engineers, c1979.

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Details

Additional Authors
  • Dey, Jim.
  • Northern California Microphotomask/Masking Working Group.
Description
vi, 194 p. : ill.; 28 cm.
Series Statement
  • Proceedings of the Society of Photo-optical Instrumentation Engineers ; v. 174
  • Society of Photo optical Instrumentation Engineers. Proceedings ; v. 174.
Subject
  • Semiconductors > Congresses
  • Photolithography > Congresses
  • Thin-film circuits > Congresses
  • Microelectronics > Congresses
Note
  • Proceedings of a seminar.
Bibliography (note)
  • Includes bibliographical references and indexes.
ISBN
089252202X
LCCN
80105579
OCLC
  • ocm06144988
  • SCSB-9331509
Owning Institutions
Princeton University Library