Research Catalog

Spectroscopic characterization techniques for semiconductor technology II : January 21-22, 1985, Los Angeles, California

Title
Spectroscopic characterization techniques for semiconductor technology II : January 21-22, 1985, Los Angeles, California / Fred H. Pollak, chairman/editor.
Publication
Bellingham, Wash., USA : SPIE--the International Society for Optical Engineering, ©1985.

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Details

Additional Authors
  • Pollak, Fred H.
  • Society of Photo-Optical Instrumentation Engineers.
Description
vi, 169 pages : illustrations; 28 cm.
Series Statement
Proceedings of SPIE--the International Society for Optical Engineering ; v. 524
Uniform Title
Proceedings of SPIE--the International Society for Optical Engineering ; v. 524.
Subjects
Genre/Form
  • proceedings (reports)
  • Conference papers and proceedings
  • Conference papers and proceedings.
  • Actes de congrès.
Bibliography (note)
  • Includes bibliographies and index.
ISBN
  • 0892525592
  • 9780892525591
LCCN
85050424
OCLC
  • ocm12307424
  • 12307424
  • SCSB-620878
Owning Institutions
Princeton University Library