Research Catalog
Silicon processing for the VLSI era
- Title
- Silicon processing for the VLSI era / Stanley Wolf, Richard N. Tauber.
- Author
- Wolf, Stanley, 1943-
- Publication
- Sunset Beach, Calif. : Lattice Press, ©2000->
Items in the Library & Off-site
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1 Item
Status | Vol/Date | Format | Access | Call Number | Item Location |
---|---|---|---|---|---|
vol. 1 | Text | Use in library | TK7874 .W635 2000 vol. 1 | Off-site |
Details
- Additional Authors
- Tauber, Richard N.
- Description
- volumes <1-> : illustrations; 25 cm
- Subject
- Note
- JM20000323.
- Bibliography (note)
- Includes bibliographies and indexes.
- Contents
- v. 1. Process technology -- v. 2. Process integration -- v. 3. The submicron MOSFET.
- ISBN
- 9780961672164
- 0961672161
- OCLC
- ocm43698493
- 43698493
- SCSB-9340867
- Owning Institutions
- Princeton University Library