Research Catalog

Silicon processing for the VLSI era

Title
Silicon processing for the VLSI era / Stanley Wolf, Richard N. Tauber.
Author
Wolf, Stanley, 1943-
Publication
Sunset Beach, Calif. : Lattice Press, ©2000->

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1 Item

StatusVol/DateFormatAccessCall NumberItem Location
vol. 1TextUse in library TK7874 .W635 2000 vol. 1Off-site

Details

Additional Authors
Tauber, Richard N.
Description
volumes <1-> : illustrations; 25 cm
Subject
  • Integrated circuits > Very large scale integration
  • Silicon
  • Silicon
  • silicon
  • Circuits intégrés à très grande échelle
  • Silicium > Applications industrielles
Note
  • JM20000323.
Bibliography (note)
  • Includes bibliographies and indexes.
Contents
v. 1. Process technology -- v. 2. Process integration -- v. 3. The submicron MOSFET.
ISBN
  • 9780961672164
  • 0961672161
OCLC
  • ocm43698493
  • 43698493
  • SCSB-9340867
Owning Institutions
Princeton University Library