Research Catalog

Stress-induced phenomena in metallization : Sixth International Workshop on Stress-Induced Phenomena in Metallization, Ithaca, New York, 25-27 July 2001

Title
Stress-induced phenomena in metallization : Sixth International Workshop on Stress-Induced Phenomena in Metallization, Ithaca, New York, 25-27 July 2001 / editors, Shefford P. Baker [and others].
Author
International Workshop on Stress-Induced Phenomena in Metallization (6th : 2001 : Ithaca, N.Y.)
Publication
Melville, NY : American Institute of Physics, 2002.

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StatusFormatAccessCall NumberItem Location
Book/TextUse in library TK7871.85 .S768 2002Off-site

Details

Additional Authors
Baker, Shefford P.
Description
ix, 250 pages : illustrations; 25 cm.
Series Statement
AIP conference proceedings, 0094-243X ; v. 612
Uniform Title
AIP conference proceedings ; no. 612.
Subject
  • Integrated circuits > Defects > Congresses
  • Thin film devices > Defects > Congresses
  • Electrodiffusion > Congresses
  • Semiconductors > Defects > Congresses
  • Metallic films > Congresses
  • Aluminum films > Congresses
  • Metallizing > Congresses
  • Electrodiffusion
  • Integrated circuits > Defects
  • Thin film devices > Defects
  • Metallic films > Electric properties > Congresses
  • Thin film devices > Congresses
  • Aluminum films > Electric properties > Congresses
Genre/Form
Conference papers and proceedings.
Bibliography (note)
  • Includes bibliographical references and index.
Additional Formats (note)
  • Also available in an electronic version.
Contents
Electromigration stresses and mechanisms -- Cyclic loading effects -- Stress voiding -- Deformation and stresses.
ISBN
  • 073540058X
  • 9780735400580
LCCN
2002102851
OCLC
  • ocm49723827
  • 49723827
  • SCSB-1257157
Owning Institutions
Princeton University Library