Research Catalog

Modern optical characterization techniques for semiconductors and semiconductor devices

Title
Modern optical characterization techniques for semiconductors and semiconductor devices / O.J. Glembocki, Fred H. Pollak, J.J. Song, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating sponsor, the Metallurgical Society.
Publication
Bellingham, Wash., USA : SPIE--the International Society for Optical Engineering, c1987.

Items in the Library & Off-site

Filter by

1 Item

StatusFormatAccessCall NumberItem Location
Request for On-site UseRequest Scan
Not available - Please for assistance.
TextUse in library TK7872.T55 M63 1987Off-site

Details

Additional Authors
  • Glembocki, O. J.
  • Pollak, Fred H.
  • Song, J. J.
  • Society of Photo-Optical Instrumentation Engineers.
  • Metallurgical Society (U.S.)
Description
vi, 282 p. : ill.; 28 cm.
Series Statement
Proceedings of SPIE--the International Society for Optical Engineering ; v. 794
Subject
  • Thin film devices > Congresses
  • Thin films > Optical properties > Congresses
Note
  • "26-27 March 1987, Bay Point, Florida."
Bibliography (note)
  • Includes bibliographies and index.
ISBN
089252829X (pbk.)
LCCN
87061007
OCLC
  • ocm16637798
  • SCSB-1704467
Owning Institutions
Princeton University Library