Research Catalog

Spectroscopic characterization techniques for semiconductor technology III : 14-15 March 1988, Newport Beach, California

Title
Spectroscopic characterization techniques for semiconductor technology III : 14-15 March 1988, Newport Beach, California / Orest J. Glembocki, Fred H. Pollak, Fernando Ponce, chairs/editors ; sponsored by Optical Society of America, SPIE--the International Society for Optical Engineering ; cooperating organization, the Metallurgical Society.
Publication
Bellingham, Wash., USA : SPIE, c1988.

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Details

Additional Authors
  • Glembocki, O. J.
  • Pollak, Fred H.
  • Ponce, Fernando.
  • Optical Society of America.
  • Society of Photo-optical Instrumentation Engineers.
  • Metallurgical Society (U.S.)
Description
viii, 234 p. : ill.; 29 cm.
Series Statement
Proceedings of SPIE--the International Society for Optical Engineering ; v. 946
Subject
  • Semiconductors > Testing > Congresses
  • Spectrum analysis > Congresses
Bibliography (note)
  • Includes bibliographical references and index.
ISBN
0892529814
OCLC
  • ocm20394274
  • SCSB-1712262
Owning Institutions
Princeton University Library