Research Catalog

Plasma processing : proceedings of the third Symposium on Plasma Processing

Title
Plasma processing : proceedings of the third Symposium on Plasma Processing / edited by J. Dieleman, R.G. Frieser, G.S. Mathad ; [sponsored by] Dielectrics and Insulation and Electronics Divisions.
Author
Symposium on Plasma Processing (3rd : 1981 : Denver, Colo.)
Publication
Pennington, N.J. (10 S. Main St., Pennington 08534) : Electrochemical Society, ©1982.

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Details

Additional Authors
  • Dieleman, J.
  • Frieser, R. G.
  • Mathad, G. S.
  • Electrochemical Society. Dielectrics and Insulation Division.
  • Electrochemical Society. Electronics Division.
Description
xi, 516 pages : illustrations; 23 cm.
Series Statement
Proceedings / the Electrochemical Society ; v. 82-6
Uniform Title
Proceedings (Electrochemical Society) ; v. 82-6.
Subject
  • Plasma engineering > Congresses
  • Plasma engineering
Genre/Form
Conference papers and proceedings.
Bibliography (note)
  • Includes bibliographical references and indexes.
LCCN
82082859
OCLC
  • ocm09255854
  • 9255854
  • SCSB-9205089
Owning Institutions
Princeton University Library