Research Catalog

Photonic MEMS devices : design, fabrication and control

Title
Photonic MEMS devices : design, fabrication and control / Ai-Qun Liu ; co-authors, Xuming Zhang [and others].
Author
Liu, Ai-Qun.
Publication
Boca Raton, FL : CRC Press, ©2009.

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StatusFormatAccessCall NumberItem Location
Book/TextUse in library TK7875 .L582 2009Off-site

Details

Description
483 pages : illustrations; 27 cm
Summary
"An extension on traditional design and analysis, Photonic MEMS Devices: Design, Fabrication and Control describes a broad range of optical and photonic devices, from MEMS optical switches and bandgap crystal switches to optical variable attenuators (VOA) and injection locked tunable lasers. It deals rigorously with all these technologies at a fundamental level, systematically introducing critical nomenclature. Each chapter also provides analysis techniques, equations, and experimental results. The book focuses not only on traditional design analysis, but also provides extensive background on realistic simulation and fabrication processes." "With a clear attention to experimental relevance, this book provides the fundamental knowledge needed to take the next step in integrating photonic MEMS devices into commercial products and technology."--Jacket
Series Statement
Optical science and engineering series ; 136
Uniform Title
Optical science and engineering (CRC Press) ; 136.
Subject
  • Microelectromechanical systems
  • Photonics
  • MEMS
  • Photonik
Bibliography (note)
  • Includes bibliographical references and index.
Contents
MEMS optical switches and systems / Jing Li and Ai-Qun Liu -- Design of MEMS optical switches / Jing Li and Ai-Qun Liu -- PHC microresonators dynamic modulation devices / Selin Hwee Gee Teo and Ai-Qun Liu -- MEMS variable optical attenuators / Xuming Zhang, Hong Cai, and Ai-Qun Liu -- MEMS discretely tunable lasers / Xuming Zhang and Ai-Qun Liu -- MEMS continuously tunable lasers / Xuming Zhang and Ai-Qun Liu -- MEMS injection-locked lasers / Xuming Zhang and Ai-Qun Liu -- Deep etching fabrication process / Jing Li and Ai-Qun Liu -- Deep Submicron photonic bandgap crystal fabrication processes / Selin Hwee Gee Teo and Ai-Qun Liu -- Control strategies for electrostatic MEMS devices / Bruno Borovic and Frank L. Lewis -- Control of optical devices / Bruno Borovic and Frank L. Lewis.
ISBN
  • 9781420045680
  • 1420045687
LCCN
2008301219
OCLC
  • ocn150381346
  • 150381346
  • SCSB-9339043
Owning Institutions
Princeton University Library