Research Catalog

Monitoring and control of plasma-enhanced processing of semiconductors : proceedings : 1-2 November 1988, Santa Clara, California

Title
Monitoring and control of plasma-enhanced processing of semiconductors : proceedings : 1-2 November 1988, Santa Clara, California / James E. Griffiths, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering.
Publication
Bellingham, Wash., USA : SPIE, ©1989.

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Details

Additional Authors
  • Griffiths, James E.
  • Society of Photo-Optical Instrumentation Engineers.
Description
viii, 147 pages : illustrations; 28 cm.
Series Statement
SPIE proceedings series ; v. 1037
Uniform Title
Proceedings of SPIE--the International Society for Optical Engineering ; v. 1037.
Subject
  • Semiconductors > Congresses
  • Plasma engineering > Congresses
  • Epitaxy > Congresses
  • Vapor-plating > Congresses
  • Epitaxy
  • Plasma engineering
  • Semiconductors
  • Vapor-plating
  • SEMICONDUCTORS
  • QUALITY CONTROL
  • OPTOELECTRONIC DEVICES
  • OPTICAL MEASURING INSTRUMENTS
  • INSPECTION
  • CONFERENCES
Genre/Form
Conference papers and proceedings.
Bibliography (note)
  • Includes bibliographical references and index.
ISBN
  • 0819400726
  • 9780819400727
LCCN
88063652
OCLC
  • ocm19728916
  • 19728916
  • SCSB-9331917
Owning Institutions
Princeton University Library