Research Catalog

Copper interconnect technology

Title
Copper interconnect technology / Tapan Gupta.
Author
Gupta, Tapan.
Publication
Dordrecht ; New York : Springer, ©2009.

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TextUse in library TK7874.53 .G878 2009Off-site

Details

Description
xix, 423 pages : illustrations; 25 cm
Subject
  • Interconnects (Integrated circuit technology)
  • Microelectronics
  • Copper
  • Miniaturization
  • Copper
  • microelectronics
  • coppers (regalia)
Bibliography (note)
  • Includes bibliographical references and index.
ISBN
  • 9781441900753
  • 1441900756
  • 1441900764
  • 9781441900760
LCCN
2009928021
OCLC
  • ocn310401019
  • 310401019
  • SCSB-9334728
Owning Institutions
Princeton University Library