Research Catalog
In-situ patterning : selective area deposition and etching : symposium held November 29-December 1, 1989, Boston, Massachusetts, U.S.A.
- Title
- In-situ patterning : selective area deposition and etching : symposium held November 29-December 1, 1989, Boston, Massachusetts, U.S.A. / editors, Anthony F. Bernhardt, Jerry G. Black, Robert Rosenberg.
- Publication
- Pittsburgh, Pa. : Materials Research Society, c1990.
Items in the Library & Off-site
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1 Item
Status | Format | Access | Call Number | Item Location |
---|---|---|---|---|
Book/Text | Use in library | TK7871.85 .I49 1990 | Off-site |
Holdings
Details
- Additional Authors
- Description
- xi, 496 p. : ill.; 24 cm.
- Series Statement
- Materials Research Society symposium proceedings ; v. 158
- Uniform Title
- Materials Research Society symposia proceedings ; v. 158.
- Subject
- Bibliography (note)
- Includes bibliographical references and indexes.
- ISBN
- 1558990461
- LCCN
- 90034801
- OCLC
- ocm21334618
- SCSB-9332088
- Owning Institutions
- Princeton University Library