Research Catalog

In-situ patterning : selective area deposition and etching : symposium held November 29-December 1, 1989, Boston, Massachusetts, U.S.A.

Title
In-situ patterning : selective area deposition and etching : symposium held November 29-December 1, 1989, Boston, Massachusetts, U.S.A. / editors, Anthony F. Bernhardt, Jerry G. Black, Robert Rosenberg.
Publication
Pittsburgh, Pa. : Materials Research Society, c1990.

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Book/TextUse in library TK7871.85 .I49 1990Off-site

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Details

Additional Authors
  • Bernhardt, Anthony.
  • Black, Jerry G.
  • Rosenberg, R.
Description
xi, 496 p. : ill.; 24 cm.
Series Statement
Materials Research Society symposium proceedings ; v. 158
Uniform Title
Materials Research Society symposia proceedings ; v. 158.
Subject
  • Semiconductors > Etching > Congresses
  • Semiconductor doping > Congresses
  • Lasers > Industrial applications > Congresses
  • Plasma etching > Congresses
Bibliography (note)
  • Includes bibliographical references and indexes.
ISBN
1558990461
LCCN
90034801
OCLC
  • ocm21334618
  • SCSB-9332088
Owning Institutions
Princeton University Library