Research Catalog

Surface and interface analysis of microelectronic materials processing and growth : 12-13 October 1989, Santa Clara, California

Title
Surface and interface analysis of microelectronic materials processing and growth : 12-13 October 1989, Santa Clara, California / Leonard J. Brillson, Fred H. Pollak, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations: Center for Advanced Electronic Materials Processing, North Carolina State University, Engineering Research Center for Plasma-Aided Manufacturing, University of Wisconsin-Madison, SEMATECH.
Publication
Bellingham, Wash., USA : SPIE--the International Society for Optical Engineering, ©1990.

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Details

Additional Authors
  • Brillson, L. J.
  • Pollak, Fred H.
  • Society of Photo-Optical Instrumentation Engineers.
  • North Carolina State University. Center for Advanced Electronic Materials Processing.
  • University of Wisconsin--Madison. Engineering Research Center for Plasma-Aided Manufacturing.
  • SEMATECH (Organization)
Description
vi, 201 pages : illustrations; 28 cm
Series Statement
Proceedings / SPIE--the International Society for Optical Engineering ; v. 1186
Uniform Title
Proceedings of SPIE--the International Society for Optical Engineering ; v. 1186.
Subject
  • Microelectronics > Materials > Congresses
  • Surfaces (Technology) > Analysis > Congresses
  • Semiconductors > Materials > Congresses
  • Microelectronics > Materials
  • Semiconductors > Materials
  • Surfaces (Technology) > Analysis
Genre/Form
Conference papers and proceedings.
Bibliography (note)
  • Includes bibliographical references and index.
ISBN
  • 0819402222
  • 9780819402226
LCCN
89043522
OCLC
  • ocm21282100
  • 21282100
  • SCSB-1909241
Owning Institutions
Princeton University Library