Research Catalog

Semiconductor microlithography VI : March 30-3l, 1981, San Jose, California

Title
Semiconductor microlithography VI : March 30-3l, 1981, San Jose, California / Jim Dey, editor.
Publication
Bellingham, Wash. : SPIE, c1981.

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Details

Additional Authors
  • Dey, Jim.
  • Society of Photo-Optical Instrumentation Engineers.
Description
vi, 221 p. : ill.; 29 cm.
Series Statement
Proceedings of SPIE ; v. 275
Uniform Title
Proceedings of the Society of Photo-optical Instrumentation Engineers ; v. 275.
Subject
  • Semiconductors > Congresses
  • Photolithography > Congresses
ISBN
0892523085
LCCN
81051405
OCLC
  • ocm07654491
  • SCSB-29585
Owning Institutions
Princeton University Library