Research Catalog

The journal of vacuum science and technology.

Title: The journal of vacuum science and technology.
Publication: [New York, N.Y.] : Published for the American Vacuum Society by the American Institute of Physics, 1964-1982.

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Item details
Status	Vol/Date	Format	Access	Call Number	Item Location
Request for On-site Use Request Scan How do I pick up this item and when will it be ready?	vol. 16, no. 1-3 Jan.-June 1979	Text	Use in library	8200.508 vol. 16, no. 1-3 Jan.-June 1979	Off-site
Request for On-site Use Request Scan How do I pick up this item and when will it be ready?	vol. 12 1975	Text	Use in library	8200.508 vol. 12 1975	Off-site
Request for On-site Use Request Scan How do I pick up this item and when will it be ready?	vol. 11 1974	Text	Use in library	8200.508 vol. 11 1974	Off-site
Request for On-site Use Request Scan How do I pick up this item and when will it be ready?	vol. 8 1971	Text	Use in library	8200.508 vol. 8 1971	Off-site
Request for On-site Use Request Scan How do I pick up this item and when will it be ready?	vol. 3 1966	Text	Use in library	8200.508 vol. 3 1966	Off-site
Request for On-site Use Request Scan How do I pick up this item and when will it be ready?	vol. 1-2 1964-1965	Text	Use in library	8200.508 vol. 1-2 1964-1965	Off-site

Additional Authors

Publication Date

Vol. 1, no. 1 (Sept./Oct. 1964)-v. 21, no. 4 (Nov./Dec. 1982).

Description

21 v. : ill.; 28 cm.

Alternative Title

Journal of vacuum science & technology

Subject

Vacuum technology > Periodicals

Genre/Form

Periodicals.

Note

Issued By (note)

Linking Entry (note)

Split into: Journal of vacuum science & technology. A, Vacuum, surfaces and films, and: Journal of vacuum science & technology. B, Microelectronics processing and phenomena.

ISSN

0022-5355

LCCN

68053979 //r85

OCLC

Owning Institutions

Princeton University Library