Research Catalog
10th Annual Symposium on Microlithography : proceedings : September 26-27, 1990, Sunnyvale Hilton, Sunnyvale, California
- Title
- 10th Annual Symposium on Microlithography : proceedings : September 26-27, 1990, Sunnyvale Hilton, Sunnyvale, California / sponsored by Bacus International.
- Author
- Symposium on Microlithography (10th : 1990 : Sunnyvale, Calif.)
- Publication
- Bellingham, Wash., USA : SPIE--the International Society for Optical Engineering, c1991.
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| Status | Format | Access | Call Number | Item Location |
|---|---|---|---|---|
Not available - Please for assistance. | Text | Use in library | TK7871.85 .S965 1990 | Off-site |
Details
- Additional Authors
- BACUS International (Firm)
- Description
- v, 315 p. : ill.; 28 cm.
- Series Statement
- SPIE proceedings series ; v. 1496
- Uniform Title
- Proceedings of SPIE--the International Society for Optical Engineering ; v. 1496.
- Alternative Title
- Tenth Annual Symposium on Microlithography.
- Subject
- Bibliography (note)
- Includes bibliographical references and index.
- ISBN
- 0819406058
- LCCN
- 91060046
- OCLC
- ocm23526852
- SCSB-1939351
- Owning Institutions
- Princeton University Library