Research Catalog

Spectroscopic characterization techniques for semiconductor technology IV : 25-26 March 1992, Somerset, New Jersey

Title
Spectroscopic characterization techniques for semiconductor technology IV : 25-26 March 1992, Somerset, New Jersey / Orest J. Glembocki, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering.
Publication
Bellingham, Wash. : Society of Photo-optical Instrumentation Engineers, ©1992.

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Details

Additional Authors
  • Glembocki, O. J.
  • Society of Photo-Optical Instrumentation Engineers.
Description
ix, 308 pages : illustrations; 28 cm.
Series Statement
SPIE proceedings series ; v. 1678
Uniform Title
Proceedings of SPIE--the International Society for Optical Engineering ; v. 1678.
Subject
  • Semiconductors > Characterization > Congresses
  • Semiconductors > Testing > Optical methods > Congresses
  • Spectrum analysis > Congresses
  • Semiconductors > Characterization
  • Semiconductors > Testing > Optical methods
  • Spectrum analysis
Genre/Form
Conference papers and proceedings.
Bibliography (note)
  • Includes bibliographies and index.
Contents
Structural spectroscopies -- Photoluminescence spectroscopy -- Raman scattering spectroscopy -- Optical and modulated-optical spectroscopy -- Free-electron laser spectroscopy -- Ellipsometry and reflectance difference spectroscopy.
ISBN
  • 0819408395
  • 9780819408396
LCCN
92081135
OCLC
  • ocm26322290
  • 26322290
  • SCSB-1951531
Owning Institutions
Princeton University Library