Research Catalog
Lasers in microelectronic manufacturing : 10-11 September 1991, San Jose, California
- Title
- Lasers in microelectronic manufacturing : 10-11 September 1991, San Jose, California / Bodil Braren, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering.
- Publication
- Bellingham, Wash. : Society of Photo-optical Instrumentation Engineers, ©1991.
Items in the Library & Off-site
Filter by
1 Item
| Status | Format | Access | Call Number | Item Location |
|---|---|---|---|---|
| Text | Use in library | TK7874 .L316 1991 | Off-site |
Details
- Additional Authors
- Description
- vii, 240 pages : illustrations; 28 cm.
- Series Statement
- SPIE proceedings series ; v. 1598
- Uniform Title
- Proceedings of SPIE--the International Society for Optical Engineering ; v. 1598.
- Subject
- Genre/Form
- Conference papers and proceedings.
- San Jose (Calif., 1991)
- Bibliography (note)
- Includes bibliographical references and index.
- Contents
- Laser cleaning, ablation, and 3-D objects -- Laser processing of wide-bandgap materials and semiconductors -- Laser repair processes in microelectronic manufacturing -- Laser applications in advanced packaging -- Poster session.
- ISBN
- 0819407291
- 9780819407290
- LCCN
- 91067489
- OCLC
- ocm25381852
- 25381852
- SCSB-1966340
- Owning Institutions
- Princeton University Library