Research Catalog

Semiconductor integrated circuit processing technology

Title
Semiconductor integrated circuit processing technology / W.R. Runyan, K.E. Bean.
Author
Runyan, W. R.
Publication
Reading, Mass. : Addison-Wesley, ©1990.

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Details

Additional Authors
Bean, Kenneth E.
Description
xviii, 683 pages : illustrations; 25 cm.
Series Statement
Addison-Wesley series in electrical and computer engineering
Uniform Title
Addison-Wesley series in electrical and computer engineering
Subject
  • Integrated circuits > Design and construction
  • Semiconductors > Design and construction
  • Integrierte Schaltung
  • Halbleiterschaltung
  • Halbleitertechnologie
  • Circuitos integrados
  • Semicondutores elementares
Bibliography (note)
  • Includes bibliographical references and index.
Contents
Historical overview -- Processing overview -- Thermal oxidation of silicon -- Definition of inorganic thin films -- Lithography -- Etching -- Epitaxy -- Impurity diffusion -- Ion implantation -- Ohmic contacts, Schottky barriers, and interconnects -- Yields and yield analysis.
ISBN
  • 0201108313
  • 9780201108316
LCCN
89000320
OCLC
  • ocm19321670
  • 19321670
  • SCSB-9333314
Owning Institutions
Princeton University Library