Research Catalog

Chemical perspectives of microelectric materials III : symposium held November 30-December 3, 1992, Boston, Massachusetts, U.S.A.

Title
Chemical perspectives of microelectric materials III : symposium held November 30-December 3, 1992, Boston, Massachusetts, U.S.A. / editors, C.R. Abernathy ... [et al.].
Publication
Pittsburgh, Pa. : Materials Research Society, c1993.

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Additional Authors
Abernathy, C. R.
Description
xv, 727 p. : ill.; 24 cm.
Series Statement
Materials Research Society symposium proceedings ; v. 282
Uniform Title
Materials Research Society symposia proceedings ; v. 282.
Subject
  • Microelectronics > Materials > Congresses
  • Semiconductors > Congresses
  • Surface chemistry > Congresses
Bibliography (note)
  • Includes bibliographical references and indexes.
ISBN
1558991778
LCCN
93020201
OCLC
  • ocm27432407
  • SCSB-1996578
Owning Institutions
Princeton University Library