Research Catalog
Rapid thermal and laser processing : 24-25 September 1992, San Jose, California
- Title
- Rapid thermal and laser processing : 24-25 September 1992, San Jose, California / Dim-Lee Kwong, Heinrich G. Müller, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.
- Publication
- Bellingham, Wash. : Society of Photo-optical Instrumentation Engineers, ©1993.
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1 Item
| Status | Format | Access | Call Number | Item Location |
|---|---|---|---|---|
| Text | Use in library | TK7871.85 .R365 1993 | Off-site |
Details
- Additional Authors
- Description
- vii, 167 pages : illustrations; 28 cm.
- Series Statement
- SPIE proceedings series ; v. 1804
- Uniform Title
- Proceedings of SPIE--the International Society for Optical Engineering ; v. 1804.
- Subject
- Semiconductors > Heat treatment > Congresses
- Semiconductor doping > Congresses
- Semiconductor industry > Laser use in. > Congresses
- Plasma-enhanced chemical vapor deposition > Congresses
- Multichip modules (Microelectronics) > Design and construction > Congresses
- Rapid thermal processing > Congresses
- Multichip modules (Microelectronics) > Design and construction
- Plasma-enhanced chemical vapor deposition
- Rapid thermal processing
- Semiconductor doping
- Semiconductor industry > Laser use in
- Semiconductors > Heat treatment
- Genre/Form
- Conference papers and proceedings.
- Bibliography (note)
- Includes bibliographical references and index.
- Additional Formats (note)
- Also available in an electronic version.
- Contents
- Modeling and equipment design -- Rapid thermal and laser-induced deposition of semiconductors and dielectrics -- Laser direct write and ablation.
- ISBN
- 0819410020
- 9780819410023
- LCCN
- 92062655
- OCLC
- ocm28052387
- 28052387
- SCSB-1998526
- Owning Institutions
- Princeton University Library