Research Catalog

The Physics and chemistry of SiO₂ and the Si-SiO₂ interface 2

Title
The Physics and chemistry of SiO₂ and the Si-SiO₂ interface 2 / edited by C. Robert Helms and Bruce E. Deal.
Publication
New York : Plenum Press, ©1993.

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Details

Additional Authors
  • Helms, C. Robert.
  • Deal, Bruce E.
  • Electrochemical Society. Electronics Division.
  • Electrochemical Society. Dielectric Science and Technology Division.
  • Symposium on the Physics and Chemistry of the SiO₂ and Si-SiO₂ Interface (2nd : 1992 : St. Louis, Mo.)
Description
xvi, 503 pages : illustrations; 26 cm
Subject
  • Silica > Surfaces > Congresses
  • Dielectrics > Surfaces > Congresses
  • Silicon dioxide films > Congresses
  • Surface chemistry > Congresses
  • Surfaces (Technology) > Congresses
  • Dielectrics > Surfaces
  • Silica > Surfaces
  • Surface chemistry
  • Surfaces (Technology)
  • Chimie des surfaces
  • Surfaces (technologie)
  • Silice > Surfaces
  • Diélectriques > Surfaces
Genre/Form
Conference papers and proceedings.
Note
  • Proceedings of the Second Symposium on the Physics and Chemistry of the SiO₂ and Si-SiO₂ Interface, held May 18-21, 1992, in St. Louis, Missouri, sponsored by the Electronics Division and the Dielectric Science and Technology Division of the Electrochemical Society.
Bibliography (note)
  • Includes bibliographical references and indexes.
ISBN
  • 0306444194
  • 9780306444197
LCCN
93014058
OCLC
  • ocm28218251
  • 28218251
  • SCSB-9234014
Owning Institutions
Princeton University Library