Research Catalog
Optical/laser microlithography VII : 2-4 March 1994, San Jose, California
- Title
- Optical/laser microlithography VII : 2-4 March 1994, San Jose, California / Timothy A. Brunner, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMI--Semiconductor Equipment and Materials International.
- Publication
- Bellingham, Wash. : Society of Photo-optical Instrumentation Engineers, ©1994.
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Details
- Additional Authors
- Description
- xiii, 1008 pages : illustrations; 28 cm
- Series Statement
- SPIE proceedings series ; v. 2197
- Uniform Title
- Proceedings of SPIE--the International Society for Optical Engineering ; v. 2197.
- Alternative Title
- Optical/laser microlithography 7
- Optical/laser microlithography seven
- Subject
- Genre/Form
- Conference papers and proceedings.
- San Jose (Calif., 1994)
- Bibliography (note)
- Includes bibliographical references and index.
- Contents
- Optimal illumination -- PSM technology -- Pattern proximity correction -- Lithographic performance -- Image simulation -- Aerial image measurement -- Application to devices -- Manufacturing issues -- Innovative imaging approaches -- Advanced light sources -- Step-and-scan lithography -- Tool subsystems.
- ISBN
- 0819414921
- 9780819414922
- LCCN
- 94065792
- OCLC
- ocm30602250
- 30602250
- SCSB-2020974
- Owning Institutions
- Princeton University Library