Research Catalog

Optical/laser microlithography VII : 2-4 March 1994, San Jose, California

Title
Optical/laser microlithography VII : 2-4 March 1994, San Jose, California / Timothy A. Brunner, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMI--Semiconductor Equipment and Materials International.
Publication
Bellingham, Wash. : Society of Photo-optical Instrumentation Engineers, ©1994.

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StatusFormatAccessCall NumberItem Location
TextUse in library TA1677 .O677 1994Off-site

Details

Additional Authors
  • Brunner, Timothy A.
  • Society of Photo-Optical Instrumentation Engineers.
  • Semiconductor Equipment and Materials International.
Description
xiii, 1008 pages : illustrations; 28 cm
Series Statement
SPIE proceedings series ; v. 2197
Uniform Title
Proceedings of SPIE--the International Society for Optical Engineering ; v. 2197.
Alternative Title
  • Optical/laser microlithography 7
  • Optical/laser microlithography seven
Subject
  • Microlithography > Congresses
  • Masks (Electronics) > Congresses
  • Optical instruments > Congresses
  • Lasers > Industrial applications > Congresses
  • Lasers > Industrial applications
  • Masks (Electronics)
  • Microlithography
  • Optical instruments
  • Kongreß
  • Photolithographie (Halbleitertechnologie)
Genre/Form
  • Conference papers and proceedings.
  • San Jose (Calif., 1994)
Bibliography (note)
  • Includes bibliographical references and index.
Contents
Optimal illumination -- PSM technology -- Pattern proximity correction -- Lithographic performance -- Image simulation -- Aerial image measurement -- Application to devices -- Manufacturing issues -- Innovative imaging approaches -- Advanced light sources -- Step-and-scan lithography -- Tool subsystems.
ISBN
  • 0819414921
  • 9780819414922
LCCN
94065792
OCLC
  • ocm30602250
  • 30602250
  • SCSB-2020974
Owning Institutions
Princeton University Library