Research Catalog

Microelectronics technology and process integration : 20-21 October 1994, Austin, Texas

Title
Microelectronics technology and process integration : 20-21 October 1994, Austin, Texas / Fusen E. Chen, Shyam P. Murarka, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.
Publication
Bellingham, Wash. : Society of Photo-optical Instrumentation Engineers, ©1994.

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Details

Additional Authors
  • Chen, Fusen E.
  • Murarka, S. P.
  • Society of Photo-optical Instrumentation Engineers.
Description
ix, 290 pages : illustrations; 28 cm.
Series Statement
SPIe proceedings series ; v. 2335
Uniform Title
Proceedings of SPIE--the International Society for Optical Engineering ; v. 2335.
Subject
  • Integrated circuits > Design and construction > Congresses
  • Metallizing > Congresses
  • Plasma etching > Congresses
  • Dielectric films > Congresses
  • Microelectronics > Congresses
  • Dielectric films
  • Integrated circuits > Design and construction
  • Metallizing
  • Microelectronics
  • Plasma etching
Genre/Form
Conference papers and proceedings.
Bibliography (note)
  • Includes bibliographical references and index.
Contents
Plasma etching and planarization -- Metallization technologies -- Metallization technologies and laser-induced processes -- Dielectric and device modeling.
ISBN
  • 0819416681
  • 9780819416681
LCCN
94067261
OCLC
  • ocm31210232
  • 31210232
  • SCSB-2032111
Owning Institutions
Princeton University Library