Research Catalog
14th Annual Symposium on Photomask Technology and Management : proceedings : 14-16 September 1994, Santa Clara, California
- Title
- 14th Annual Symposium on Photomask Technology and Management : proceedings : 14-16 September 1994, Santa Clara, California / William L. Brodsky, Gilbert V. Shelden, chairs/editors : sponsored by BACUS--the International Technical Group of SPIE dedicated to the advancement of photomask technology.
- Author
- Symposium on Photomask Technology and Management (14th : 1994 : Santa Clara, Calif.)
- Publication
- Bellingham, Wash. : SPIE--the International Society for Optical Engineering, c1994.
Items in the Library & Off-site
Filter by
1 Item
| Status | Format | Access | Call Number | Item Location |
|---|---|---|---|---|
| Text | Use in library | TK7874 .S9434 1994 | Off-site |
Details
- Additional Authors
- Description
- vii, 454 p. : ill.; 28 cm.
- Series Statement
- SPIE proceedings series ; v. 2322
- Uniform Title
- Proceedings of SPIE--the International Society for Optical Engineering ; v. 2322.
- Alternative Title
- Photomask technology and management.
- Subject
- Bibliography (note)
- Includes bibliographical references and index.
- ISBN
- 0819416533
- LCCN
- 94067248
- OCLC
- ocm31907938
- SCSB-9333475
- Owning Institutions
- Princeton University Library