Research Catalog

Rapid thermal and integrated processing III : symposium held April 4-7, 1994, San Francisco, California, U.S.A.

Title
Rapid thermal and integrated processing III : symposium held April 4-7, 1994, San Francisco, California, U.S.A. / editors, Jimmie J. Wortman [and others].
Publication
Pittsburgh, PA : Materials Research Society, ©1994.

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Details

Additional Authors
Wortman, Jimmie J.
Description
xi, 450 pages : illustrations; 24 cm.
Series Statement
Materials Research Society symposium proceedings, 0272-9172 ; v. 342
Uniform Title
Materials Research Society symposia proceedings ; v. 342.
Alternative Title
  • Rapid thermal and integrated processing 3.
  • Rapid thermal and integrated processing three
Subject
  • Semiconductors > Heat treatment > Congresses
  • Semiconductor doping > Congresses
  • Chemical vapor deposition > Congresses
  • Dielectrics > Congresses
  • Chemical vapor deposition
  • Dielectrics
  • Semiconductor doping
  • Semiconductors > Heat treatment
  • CVD-Verfahren
  • Dotierung
  • Halbleiter
  • Wärmebehandlung
  • Kongreß
Genre/Form
  • Conference papers and proceedings.
  • San Francisco (Calif., 1994)
Bibliography (note)
  • Includes bibliographical references and indexes.
ISBN
  • 1558992421
  • 9781558992429
LCCN
94019741
OCLC
  • ocm30671224
  • 30671224
  • SCSB-2039670
Owning Institutions
Princeton University Library