Research Catalog

Submicron lithography : March 29-30, 1982, Santa Clara, California

Title
Submicron lithography : March 29-30, 1982, Santa Clara, California / Phillip D. Blais, chairman-editor ; in cooperation with the International Society for Hybrid Microelectronics, the Northern California Microphotomask/Masking Working Group, the Materials Research Society.
Publication
Bellingham, Wash. : SPIE--the International Society for Optical Engineering, c1982.

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Details

Additional Authors
  • Blais, Phillip D.
  • International Society for Hybrid Microelectronics.
  • Northern California Microphotomask/Masking Working Group.
  • Materials Research Society.
Description
179 p. : ill.; 28 cm.
Series Statement
Proceedings of SPIE--the International Society for Optical Engineering ; v. 333
Subject
  • Microelectronics > Congresses
  • Photolithography > Congresses
Bibliography (note)
  • Includes bibliographical references and index.
ISBN
089252 3689 (canceled/invalid)
LCCN
82060280
OCLC
  • ocm08619934
  • SCSB-42675
Owning Institutions
Princeton University Library