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Displaying 1-4 of 4 results for author "Gutmann, Ronald J."
Chemical mechanical planarization of microelectronic materials / Joseph M. Steigerwald, Shyam P. Murarka, Ronald J. Gutmann.
- Text
- New York : J. Wiley, c1997.
- 1997
- 1 Item
Item details Format Call Number Item Location Text JSE 98-55 Offsite Copper : fundamental mechanisms for microelectronic applications / Shyam P. Murarka, Igor V. Verner, Ronald J. Gutmann.
- Text
- New York ; Chichester [England] : John Wiley, c2000.
- 2000
- 1 Item
Item details Format Call Number Item Location Text JSE 00-1026 Offsite Chemical-mechanical polishing of low dielectric constant polymers and organosilicate glasses : fundamental mechanisms and application to IC interconnect technology / by Christopher L. Borst, William N. Gill, Ronald J. Gutmann.
- Text
- Boston : Kluwer Academic Publishers, c2002.
- 2002
- 1 Item
Item details Format Call Number Item Location Text JSE 02-2045 Offsite Chemical mechanical planarization of microelectronic materials / Joseph M. Steigerwald, Shyam P. Murarka, Ronald J. Gutmann.
- Text
- New York : J. Wiley, [1997], ©1997.
- 1997-1997
- 1 Item
Item details Format Call Number Item Location Text TK7871 .S77 1997 Off-site
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