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Displaying 1-2 of 2 results for author "Lawton, Russell A."
MEMS reliability for critical and space applications : 21-22 September, 1999, Santa Clara, California / Russell A. Lawton [and others], chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering, cooperating organizations, SolidState Technology [and others].
- Text
- Bellingham, Washington : SPIE, [1999], ©1999.
- 1999-1999
- 1 Item
Item details Format Call Number Item Location Text TK7875 .M46 1999g Off-site MEMS reliability for critical applications : 20 September 2000, Santa Clara, USA / Russell A. Lawton, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Sandia National Laboratories (USA).
- Text
- Bellingham, Wash., USA : SPIE, [2000], ©2000.
- 2000-2000
- 1 Item
Item details Format Call Number Item Location Text TK7875 .M46 2000g Off-site
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