Research Catalog

  • SEMICON/West, May 20-22, 1986, San Mateo, California : process and equipment reliability in the fab environment / presented by Semiconductor Equipment and Materials Institute, Inc.

    • Text
    • Mountain View, Calif. : The Institute, [1986?]
    • 1986
    • 1 Item
    FormatCall NumberItem Location
    Text JSF 88-563Offsite
  • SEMI directory.

    • Text
    • Mountain View, Calif., Semiconductor Equipment and Materials Institute.
    • 19-19
    • 1 Item
    FormatCall NumberItem Location
    Text JSP 76-184 1975-77Offsite
  • SEMICON/East 1986 technical programs proceedings : September 16-18, Bayside Exposition Center, Boston, Massachusetts : "Reduced thermal budget processing" / presented by Semiconductor Equipment and Materials Institute, Inc.

    • Text
    • Mountain View, Calif. : SEMI, [1986?]
    • 1986
    • 1 Item
    FormatCall NumberItem Location
    Text JSF 09-269Offsite
  • SEMI Information Services Seminar transcript : January 23-26, 1983, Newport Beach Marriott Hotel, Newport Beach, California.

    • Text
    • Mountain View, Calif.(625 Ellis St., Mountain view 94043) : Semiconductor Equipment and Materials Institute, 1983.
    • 1983
    • 1 Item
    FormatCall NumberItem Location
    Text JSF 87-1003Offsite
  • Microlithography and metrology in micromachining III : 29-30 September, 1997, Austin, Texas / Craig R. Friedrich, Akira Umeda, chairs/editors ; sponsored by SPIE--the Internatinoal Society for optical Engineering, SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology ; cooperating organization Solid State Technology ; published by SPIE--the International Society for Optical Engineering.

    • Text
    • Bellingham, Washington : SPIE, [1997], ©1997.
    • 1997-1997
    • 1 Item
    FormatCall NumberItem Location
    Text QC176.8.M5 M39 1997gOff-site
  • Semiconductor fabrication : technology and metrology / Dinesh C. Gupta, editor.

    • Text
    • Philadelphia, PA : ASTM, [1989], ©1989.
    • 1989-1989
    • 1 Item
    FormatCall NumberItem Location
    Text TK7871.85 .S4617 1989Off-site
  • IEEE/SEMI International Semiconductor Manufacturing Science Symposium : theme: "Semiconductor manufacturing," May 22-24, 1989, Hyatt Regency Hotel, Burlingame, CA, USA.

    • Text
    • New York, NY : Institute of Electrical and Electronics Engineers ; Piscataway, NJ : IEEE Service Center [distributor], [1989], ©1989.
    • 1989-1989
    • 1 Item
    FormatCall NumberItem Location
    Text TK7871.85 .I225 1989gOff-site

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