Research Catalog

  • Microelectronic manufacturing yield, reliability, and failure analysis : 25-26 October 1995, Austin, Texas / Gopal Rao, Massimo Piccoli, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization SEMI--Semiconductor Equipment and Materials International.

    • Text
    • Bellingham, Wash. : SPIE, c1995.
    • 1995
    • 1 Item
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    Text TK7874 .M525 1995Off-site
  • Microlithography and metrology in micromachining : 23-24 October 1995, Austin, Texas / Michael T. Postek, chair/editor ; sponsored by SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology, SPIE--the International Society for Optical Engineering.

    • Text
    • Bellingham, Wash. : SPIE, c1995.
    • 1995
    • 1 Item
    FormatCall NumberItem Location
    Text TK7874 .M524 1995Off-site
  • Optical characterization techniques for high-performance microelectronic device manufacturing II : 25-26 October 1995, Austin, Texas / John Lowell, Ray T. Chen, Jagdish P. Mathur, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering, cooperating organization SEMI--Semiconductor Equipment and Materials International.

    • Text
    • Bellingham, Wash., USA : SPIE, c1995.
    • 1995
    • 1 Item
    FormatCall NumberItem Location
    Text TK7871.85 .O6742 1995Off-site
  • Micromachining and microfabrication process technology : 23-24 October, 1995 Austin, Texas / Karen W. Markus, chair/editor ; sponsored by SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology, SPIE--The International Society for Optical Engineering.

    • Text
    • Bellingham, Wash., USA : SPIE, c1995.
    • 1995
    • 1 Item
    FormatCall NumberItem Location
    Text TK7874 .M537 1995Off-site
  • Process, equipment, and materials control in integrated circuit manufacturing : 25-26 October, 1995, Austin, Texas / Anant G. Sabnis, Ivo J. Raaijmakers, chairs/editors ; sponsored and published by SPIE--The International Society for Optical Engineering ; cooperating organization SEMI--Semiconductor Equipment and Materials International.

    • Text
    • Bellingham, Wash., USA : SPIE, c1995.
    • 1995
    • 1 Item
    FormatCall NumberItem Location
    Text TK7874 .P763 1995Off-site
  • Microelectronic structures and microelectromechanical devices for optical processing and multimedia applications : 24 October, 1995, Austin, Texas / Wayne Bailey, M. Edward Motamedi, Fang-Chen Luo, chairs/editors ; sponsored by SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology, SPIE--The International Society for Optical Engineering.

    • Text
    • Bellingham, Wash., USA : SPIE, c1995.
    • 1995
    • 1 Item
    FormatCall NumberItem Location
    Text TK7874 .M523 1995Off-site
  • Micromachined devices and components : 23-24 October, 1995, Austin, Texas / Ray Roop, Kevin Chau, chairs/editors ; sponsored by SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology, SPIE--The International Society for Optical Engineering.

    • Text
    • Bellingham, Wash., USA : SPIE, c1995.
    • 1995
    • 1 Item
    FormatCall NumberItem Location
    Text TK7874 .M538 1995Off-site
  • IEEE/UCS/SEMI International Symposium on Semiconductor Manufacturing : [proceedings] / sponsored by the IEEE Electron Devices Society, and the Components Packaging & Manufacturing Technology Society and the Ultra Clean Society.

    • Text
    • [New York, N.Y.] : Institute of Electrical and Electronics Engineers ; Piscataway, NJ : Additional copies may be purchased from IEEE Service Center, c1995.
    • 1995
    • 1 Item
    FormatCall NumberItem Location
    Text TK7871.85 .I43 1995Off-site
  • IEEE/SEMI 1995 Advanced Semiconductor Manufacturing Conference and Workshop : theme--semiconductor manufacturing: economic solutions for the 21st century : ASMC 95 proceedings, November 13-15, 1995, Cambridge, Massachusetts.

    • Text
    • New York : IEEE, c1995.
    • 1995
    • 1 Item
    FormatCall NumberItem Location
    Text TK7871.85 .I34 1995Off-site
  • Proceedings, 1996 International Conference on Multichip Modules : April 17-19, 1996, the Marriott Tech Center, Denver, Colorado / sponsored by ISHM, International Society for Hybrid Microelectronics ... [et al.] ; endorsed by SEMI--Semiconductor Equipment and Materials International.

    • Text
    • Reston, Va. : ISHM, c1996.
    • 1996
    • 1 Item
    FormatCall NumberItem Location
    Text TA1505 .P762 vol.2794Off-site
  • Optical microlithography IX : 13-15 March, 1996, Santa Clara, California / Gene E. Fuller, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering; cooperating organizations SEMI--Semiconductor Equipment and Materials International, SEMATECH.

    • Text
    • Bellingham, Wash., USA : SPIE, c1996.
    • 1996
    • 1 Item
    FormatCall NumberItem Location
    Text TA1505 .P762 vol.2726Off-site
  • Electron-beam, X-ray, EUV, and ion-beam submicrometer lithographies for manufacturing VI : 11-13 March 1996, Santa Clara, California / David E. Seeger, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering : cooperating organization SEMI--Semiconductor Equipment and Materials International, SEMATECH.

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    • Bellingham, Wash., USA : SPIE, c1996.
    • 1996
    • 1 Item
    FormatCall NumberItem Location
    Text TA1505 .P762 vol.2723Off-site
  • Advances in resist technology and processing XIII : 11-13 March 1996, Santa Clara, California / Roderick R. Kunz, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SEMATECH.

    • Text
    • Bellingham, Wash., USA : International Society for Optical Engineering, c1996.
    • 1996
    • 1 Item
    FormatCall NumberItem Location
    Text TA1505 .P762 vol.2724Off-site
  • Microelectronic device and multilevel interconnection technology II : 16-17 October, 1996, Austin, Texas / Ih-Chin Chen ... [et al.], chairs/editors ; sponsored and published by SPIE--The International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International ... [et al.].

    • Text
    • Bellingham, Wash., USA : SPIE, c1996.
    • 1996
    • 1 Item
    FormatCall NumberItem Location
    Text TA1505 .P762 vol.2875Off-site
  • Process, equipment, and materials control in integrated circuit manufacturing II : 16-17 October, 1996, Austin, Texas / Armando Iturralde, Te-Hua Lin, chairs/editors ; sponsored and published by SPIE--The International Society for Optical Engineering ; cooperating organization SEMI--Semiconductor Equipment and Materials International.

    • Text
    • Bellingham, Wash., USA : SPIE, c1995.
    • 1996
    • 1 Item
    FormatCall NumberItem Location
    Text TA1505 .P762 vol.2876Off-site
  • Microlithography and metrology in micromachining II : 14-15 October 1996, Austin, Texas / Michael T. Postek, Craig Friedrich, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology.

    • Text
    • Bellingham, Wash. : SPIE, c1996.
    • 1996
    • 1 Item
    FormatCall NumberItem Location
    Text TA1505 .P762 vol.2880Off-site
  • Optical characterization techniques for high-performance microelectronic device manufacturing III : 16-17 October 1996, Austin, Texas / Damon DeBusk, Ray T. Chen, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations SEMI--Semiconductor Equipment and Materials International ... [et al.].

    • Text
    • Bellingham, Wash., USA : SPIE, c1996.
    • 1996
    • 1 Item
    FormatCall NumberItem Location
    Text TA1505 .P762 vol.2877Off-site
  • Microelectronic manufacturing yield, reliability, and failure analysis II : 16-17 October 1996, Austin, Texas / Ali Keshavarzi, Sharad Prasad, Hans-Dieter Hartmann, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations SEMI--Semiconductor Equipment and Materials International ... [et al.].

    • Text
    • Bellingham, Wash. : SPIE, c1996.
    • 1996
    • 1 Item
    FormatCall NumberItem Location
    Text TA1505 .P762 vol.2874Off-site
  • Micromachining and microfabrication process technology II : 14-15 October, 1996 Austin, Texas / Stella W. Pang, Shih-Chia Chang, chairs/editors ; sponsored by SPIE--The International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology ; cooperating organizations Solid State Technology, Sandia National Laboratories.

    • Text
    • Bellingham, Wash., USA : SPIE, c1996.
    • 1996
    • 1 Item
    FormatCall NumberItem Location
    Text TA1505 .P762 vol.2879Off-site
  • Micromachined devices and components II : 14-15 October, 1996, Austin, Texas / Kevin Chau, Ray M. Roop, chairs/editors ; sponsored by SPIE--The International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology.

    • Text
    • Bellingham, Wash., USA : SPIE, c1996.
    • 1996
    • 1 Item
    FormatCall NumberItem Location
    Text TA1505 .P762 vol.2882Off-site
  • Microelectronic structures and MEMS for optical processing II : 14-15 October, 1996, Austin, Texas / M. Edward Motamedi, Wayne Bailey, chairs/editors ; sponsored by SPIE--The International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology.

    • Text
    • Bellingham, Wash., USA : SPIE, c1996.
    • 1996
    • 1 Item
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    Text TA1505 .P762 vol.2881Off-site
  • Nineteenth IEEE/CPMT International Electronics Manufacturing Technology Symposium : October 14-16, 1996, Austin, TX, USA / ... sponsored by Semiconductor Equipment and Materials International (SEMI) and by the Components, Packaging, & Manufacturing Technology (CPMT) Society.

    • Text
    • Piscataway, NJ : IEEE Service Center, c1996.
    • 1996
    • 1 Item
    FormatCall NumberItem Location
    Text TK7836 .I344 1996Off-site
  • IEEE/SEMI 1996 Advanced Semiconductor Manufacturing Conference and Workshop : theme--innovative approaches to growth in the semi-conductor industry : ASMC 96 proceedings, November 12-14, 1996, Cambridge, Massachusetts.

    • Text
    • Piscataway, NJ : IEEE Service Center ; Mountain View, CA : SEMI, c1996.
    • 1996
    • 1 Item
    FormatCall NumberItem Location
    Text TK7871.85 .I34 1996Off-site
  • Optical microlithography X : 12-14 March, 1997, Santa Clara, California / Gene E. Fuller, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations SEMI--Semiconductor Equipment and Materials International, SEMATECH.

    • Text
    • Bellingham, Wash. : SPIE, c1997.
    • 1997
    • 1 Item
    FormatCall NumberItem Location
    Text TA1505 .P762 vol.3051Off-site
  • Advances in resist technology and processing XIV : 10-12 March, 1997, Santa Clara, California / Rʹegine G. Tarascon-Auriol, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SEMATECH.

    • Text
    • Bellingham, Wash. : International Society for Optical Engineering, c1997.
    • 1997
    • 1 Item
    FormatCall NumberItem Location
    Text TA1505 .P762 vol.3049Off-site
  • Emerging lithographic technologies : 10-11 March 1997, Santa Clara, California / David E. Seeger, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering : cooperating organization SEMI--Semiconductor Equipment and Materials International, SEMATECH.

    • Text
    • Bellingham, Wash., USA : SPIE, c1997.
    • 1997
    • 1 Item
    FormatCall NumberItem Location
    Text TA1505 .P762 vol.3048Off-site
  • 1997 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop : theme--the quest for semiconductor manufacturing excellence: leading the charge into the 21st century, September 10-12, 1997, Cambridge, Massachusetts : ASMC 97 proceedings.

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    • Piscataway, NJ : IEEE Service Center ; Mountain View, CA : SEMI, c1997.
    • 1997
    • 1 Item
    FormatCall NumberItem Location
    Text TK7871.85 .I34 1997Off-site
  • Twenty first IEEE/CPMT International Electronics Manufacturing Technology Symposium : October 13-15, 1997, Austin, TX, USA / ... sponsored by Semiconductor Equipment and Materials International (SEMI) and by the Components, Packaging, & Manufacturing Technology (CPMT) Society.

    • Text
    • Piscataway, NJ : IEEE Service Center, c1997.
    • 1997
    • 1 Item
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    Text TK7836 .I344 1997Off-site
  • Twenty third IEEE/CPMT International Electronics Manufacturing Technology Symposium : October 19-21, 1998, Austin, TX, USA / sponsored by Semiconductor Equipment and Materials International (SEMI) and by the Components, Packaging, & Manufacturing Technology (CPMT) Society.

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    • Piscataway, NJ : IEEE Service Center, c1998.
    • 1998
    • 1 Item
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    Text TK7836.I344 1998bOff-site
  • 1998 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop : theme - semiconductor manufacturing: meeting the challenges of the global marketplace, September 23-25, 1998, Boston, Massachusetts, USA : ASMC 98 proceedings.

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    • Piscataway, NJ : IEEE Service Center ; Mountain View, Calif. : SEMI, c1998.
    • 1998
    • 1 Item
    FormatCall NumberItem Location
    Text TK7871.85.I34 1998Off-site
  • 1999 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop : ASME proceedings : September 8-10, 1999, Boston, Massacusetts, USA.

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    • Piscataway, NJ : IEEE, c1999.
    • 1999
    • 1 Item
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    Text TK7871.85 .I34 1999Off-site
  • Twenty Fourth IEEE/CPMT International Electronics Manufacturing Technology Symposium : October 18-19, 1999, Austin, TX, USA.

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    • 1999
    • 1 Item
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    Text TK7836 .I344 1999Off-site
  • 2000 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop : ASME 2000 proceedings : September 12-14, 2000, Boston, Massacusetts, USA.

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    • 2000
    • 1 Item
    FormatCall NumberItem Location
    Text TK7871.85 .I34 2000Off-site
  • Twenty sixth IEEE/CPMT International Electronics Manufacturing Technology Symposium : proceedings : 2000 IEMT Symposium : October 2-3,2000, Santa Clara, CA, USA / sponsored by: SEMI, Semiconductor Equipment and Materials International [and] CPMT, the Components, Packaging, & Manufacturing Technology Society of the IEEE.

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    • 2000
    • 1 Item
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    Text TK7836 .I344 2000Off-site
  • IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop : ASMC '91 proceedings : October 21-23, 1991, Boston, Massachusetts.

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    • 1991
    • 1 Item
    FormatCall NumberItem Location
    Text TK7871.85 .I34 1991Off-site
  • IEEE/SEMI International Semiconductor Manufacturing Science Symposium : San Francisco, CA, USA, June 15-16, 1992.

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    • 1992
    • 1 Item
    FormatCall NumberItem Location
    Text TK7871.85 .I43 1992Off-site
  • Optical/laser microlithography VII : 2-4 March 1994, San Jose, California / Timothy A. Brunner, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization SEMI--Semiconductor Equipment and Materials International.

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    • 1994
    • 1 Item
    FormatCall NumberItem Location
    Text TA1677 .O677 1994Off-site
  • Multichip modules : international conference and exhibition, 13-15 April 1994, Denver, Colorado / sponsored by ISHM--the Microelectronics Society ... [et al.] ; in cooperation with SEMI--Semiconductor Equipment and Materials International, IPC--the Institute for Interconnecting and Packaging Electronic Circuits.

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    • 1994
    • 1 Item
    FormatCall NumberItem Location
    Text TK7870.15 .M832 1994Off-site
  • IEEE/SEMI 1994 Advanced Semiconductor Manufacturing Conference and Workshop : theme--manufacturing exellence, a global challenge : ASMC '94 proceedings, November 14-16, 1994, Cambridge, Massachusetts.

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    • 1994
    • 1 Item
    FormatCall NumberItem Location
    Text TK7871.85 .I34 1994Off-site
  • 1995 International Conference on Multichip Modules : 19-21 April 1995, Denver, Colorado / sponsored by ISHM--the Microelectronics Society ... [et al.] ; endorsed by SEMI--Semiconductor Equipment and Materials International, PCMCIA--Personal Computer Memory Card International Association.

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    • 1995
    • 1 Item
    FormatCall NumberItem Location
    Text TK7870.15 .M833 1995Off-site
  • Optical/laser microlithography VIII : 22-24 February 1995, Santa Clara, California / Timothy A. Brunner, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization SEMI--Semiconductor Equipment and Materials International.

    • Text
    • 1995
    • 1 Item
    FormatCall NumberItem Location
    Text TA1677 .O678 1995Off-site
  • Integrated circuit metrology, inspection, and process control IX : 20-22 February, Santa Clara, California / Marylyn H. Bennett, chair/editor ; sponsored and published by SPIE-the International Society for Optical Engineering ; cooperating organization SEMI--Semiconductor Equipment and Materials International.

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    • 1995
    • 1 Item
    FormatCall NumberItem Location
    Text TK7874 .I54689 1995Off-site
  • Electron-beam, X-ray, EUV, and ion-beam submicrometer lithographies for manufacturing V : 20-21 February 1995, Santa Clara, California / John M. Warlaumont, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering : cooperating organization SEMI--Semiconductor Equipment and Materials International.

    • Text
    • Bellingham, Wash., USA : SPIE, c1995.
    • 1995
    • 1 Item
    FormatCall NumberItem Location
    Text TK7874 .E437 1995Off-site
  • Advances in resist technology and processing XII : 20-22 February 1995, Santa Clara, California / Robert D. Allen, chair/editor : sponsored and published by SPIE--the International Society for Optical Engineering ; cooperationg organization SEMI--Semiconductor Equipment and Materials International.

    • Text
    • 1995
    • 1 Item
    FormatCall NumberItem Location
    Text TK8331 .A387 1995Off-site

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