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Displaying 1-2 of 2 results for author "Allen, Robert D."
Advances in resist technology and processing XII : 20-22 February 1995, Santa Clara, California / Robert D. Allen, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMI--Semiconductor Equipment and Materials International.
- Text
- Bellingham, Wash., USA : SPIE, [1995], ©1995.
- 1995-1995
- 1 Item
Item details Format Call Number Item Location Text TK7874 .A25 1995g Off-site Advances in resist technology and processing XII : 20-22 February 1995, Santa Clara, California / Robert D. Allen, chair/editor : sponsored and published by SPIE--the International Society for Optical Engineering ; cooperationg organization SEMI--Semiconductor Equipment and Materials International.
- Text
- 1995
- 1 Item
Item details Format Call Number Item Location Text TK8331 .A387 1995 Off-site
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