Research Catalog

  • Electron-beam, X-ray, and ion-beam techniques for submicrometer lithographies IV : March 14-15, 1985, Santa Clara, California / Philip D. Blais, chairman/editor ; cooperating organization, the International Society for Hybrid Microelectronics.

    • Text
    • 1985
    • 1 Item
    FormatCall NumberItem Location
    Text TK7874 .E433Off-site
  • Electron-beam, X-ray, and ion-beam techniques for submicrometer lithographies IV : March 14-15, 1985, Santa Clara, California / Philip D. Blais, chairman/editor ; cooperating organization, the International Society for Hybrid Microelectronics.

    • Text
    • Bellingham, Wash. : SPIE--the International Society for Optical Engineering, c1985.
    • 1985
    • 1 Item
    FormatCall NumberItem Location
    Text TK7874 .E433Off-site

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