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Displaying 1-3 of 3 results for author "Freund, Robert S."
Multichamber and in-situ processing of electronic materials : 10-11 October 1989, Santa Clara, California / Robert S. Freund, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, Center for Advanced Electronic Materials Processing/North Carolina State University, Engineering Research Center for Plasma-Aided Manufacturing/University of Wisconsin-Madison, SEMATECH.
- Text
- Bellingham, Wash., USA : SPIE--The International Society for Optical Engineering, [1990], ©1990.
- 1990-1990
- 1 Item
Item details Format Call Number Item Location Text TK7836 .M85 1990g Off-site Multichamber and in-situ processing of electronic materials : 10-11 October 1989, Santa Clara, California / Robert S. Freund, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering.
- Text
- Bellingham, Wash., USA : The Society, c1990.
- 1990
- 1 Item
Item details Format Call Number Item Location Text TK7874.M84 Off-site Multichamber and in-situ processing of electronic materials : 10-11 October 1989, Santa Clara, California / Robert S. Freund, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering.
- Text
- Bellingham, Wash., USA : The Society, c1990.
- 1990
- 1 Item
Item details Format Call Number Item Location Book/Text TK7874.M84 Off-site
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