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Displaying 1-1 of 1 results for author "Habraken, F. H. P. M."
LPCVD silicon nitride and oxynitride films : material and applications in integrated circuit technology / F.H.P.M. Habraken, (Ed.).
- Text
- Berlin ; New York : Springer-Verlag, 1991.
- 1991
- 1 Item
Item details Format Call Number Item Location Text TK7871.15.S558 L63 1991g Off-site
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