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Displaying 1-1 of 1 results for author "Jerke, John M."
Accurate linewidth measurements on integrated-circuit photomasks / John M. Jerke, editor, Electron Devices Division, Center for Electronics and Electrical Engineering, National Engineering Laboratory, National Bureau of Standards.
- Text
- Washington : Department of Commerce, National Bureau of Standards : for sale by the Supt. of Docs., U.S. Govt. Print. Off., 1980.
- 1980
- 1 Item
Item details Format Call Number Item Location Text C 13.10:400-43 Off-site
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