Research Catalog

  • Micromachining technology for micro-optics and nano-optics : 28-29 January 2003, San Jose, California, USA / Eric G. Johnson, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Sandia National Laboratories (USA).

    • Text
    • Bellingham, Wash., USA : SPIE, [2003], ©2003.
    • 2003-2003
    • 1 Item
    FormatCall NumberItem Location
    Text TA1660 .M536 2003gOff-site

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