Research Catalog

  • A production-compatible microelectronic test pattern for evaluating photomask misalignment / T. J. Russell, D. A. Maxwell, Electron Devices Division, Center for Electronics and Electrical Engineering, National Engineering Laboratory, National Bureau of Standards ; sponsored by the National Bureau of Standards and Advanced Research Projects Agency.

    • Text
    • Washington : Department of Commerce, National Bureau of Standards : for sale by the Supt. of Docs., 1979.
    • 1979
    • 1 Item
    FormatCall NumberItem Location
    Text C 13.10:400-51Off-site

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