Research Catalog

  • Electron beam induced damage in PECVD Si₃N₄ and SiO₂ films on InP [microform] / Dragan M. Pantic ... [et al.] ; presented at the Dielectric Films on Compound Semiconductors Symposium sponsored by the Electrochemical Society, Honolulu, Hawaii, October 18-23, 1987.

    • Text
    • [Washington, D.C.] : NASA ; Springfield, Va. : For sale by the National Technical Information Service, [1990]
    • 1990
    • 1 Resource

    Available Online

    http://purl.access.gpo.gov/GPO/LPS69699

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