Research Catalog

  • Documentation for Reference Material (RM) 8820 : a versatile, multipurpose dimensional metrology calibration standard for scanned particle beam, scanned probe, and optical microscopy / Michael T. Postek, Andras E. Vladar, Bin Mang, Benjamin Bunday.

    • Text
    • Gaithersburg, MD : U.S. Dept. of Commerce, National Institute of Standards and Technology, 2014.
    • 2014
    • 1 Resource

    Available Online

    https://purl.fdlp.gov/GPO/gpo95549

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