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Displaying 1-2 of 2 results for author "Reinberg, Alan R."
Dry processing for submicrometer lithography : 12-13 October 1989, Santa Clara, California / James Bondur, Alan R. Reinberg, chairs/editors ; sponsored by SPIE--The International Society for Optical Engineering ; cooperating organizations, SEMATECH, Center for Advanced Electronics Materials Processing/North Carolina State University, Engineering Research Center for Plasma-Aided Manufacturing/University of Wisconsin-Madison.
- Text
- Bellingham, Wash., USA : SPIE, [1990], ©1990.
- 1990-1990
- 1 Item
Item details Format Call Number Item Location Text TK7871.85 .D792 1990g Off-site Dry processing for submicrometer lithography : 12-13 October 1989, Santa Clara, California / James Bondur, Alan R. Reinberg, chairs/editors ; sponsored by SPIE--The International Society for Optical Engineering ; cooperating organizations, SEMATECH, Center for Advanced Electronics Materials Processing/North Carolina State University, Engineering Research Center for Plasma-Aided Manufacturing/University of Wisconsin-Madison.
- Text
- 1990
- 1 Item
Item details Format Call Number Item Location Text TK7871.85.D79 Off-site
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