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Displaying 1-2 of 2 results for author "Turner, Terry R."
Process module metrology, control, and clustering : 11-13 September 1991, San Jose, California / Cecil J. Davis, Irving P. Herman, Terry R. Turner, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.
- Text
- Bellingham, Wash. : SPIE, [1992], ©1992.
- 1992-1992
- 1 Item
Item details Format Call Number Item Location Text TK7836 .P74 1992 Off-site Advanced techniques for integrated circuit processing : 1-5 October 1990, Santa Clara, California / James Bondur, Terry R. Turner, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering.
- Text
- Bellingham, Wash., USA : SPIE, the International Society for Optical Enginering, [1991], ©1991.
- 1991-1991
- 1 Item
Item details Format Call Number Item Location Text TK7874 .A34 1991g Off-site
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